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The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.

Fresnel Lens: Most Up-to-Date Encyclopedia, News & Reviews, fresnel lens

Micromachines, Free Full-Text

Micromachines, Free Full-Text

Micro Machines

Micromachines, Free Full-Text, mdpope 1-3

DC/DC Converters: Devices Capable of Converting to Higher or Lower Voltage - Technical Articles, boost converter

Micro Machines World Series review

Micro Machines

Scavenging of reactive oxygen and nitrogen species with nanomaterials. - Abstract - Europe PMC, onoo 2 no2